SE-VM Spectral Ellipsometer Introduction: SE-VM is a high precision and fast measurement spectroscopy ellipsometer. It can quickly realize the characterization and analysis of optical parameters films and nanostructures by measuring the parameters such as ellipsometry parameters and transmission/reflectivity, which is suitable for rapid measurement and characterization of thin film materials. Support multi-angle, micro-spot, visual leveling system and other high compatibility and flexible configuration, multi-function module customized design. High-precision ellipsometry solution; ultra-high precision, fast non-destructive measurement; support multi-angle, micro-spot, visual leveling system function module flexible customization; rich database and geometric model library to ensure powerful data analysis capabilities. It is widely used in measurement applications such as coating process control and tooling calibration to realize rapid characterization and analysis of optical constants and geometric features of optical films and nanostructures. Characteristics 1. Using high-performance imported composite light source, the spectral coverage can be seen in the near-infrared range (380-1000nm) 2, high-precision rotary compensator modulation, PCRSA configuration, high-speed acquisition of Psi/Delta spectral data 3, support series configuration flexibility, can support multi-functional modular customization according to different application scenarios 4, hundreds of material databases, a variety of algorithm model library, covering most of the current photovoltaic materials Technical Parameters 1, the degree of automation: manual angle change 2, application positioning: general purpose 3, basic functions: Psi/Delta, N/C/S, R/T and other spectra 4. Analytical spectrum 380-1000nm (expandable to 210-1650nm) 5, single measurement time: 0.5-5s 6, repeatability measurement accuracy: 0.01nm 7, spot size: large spot 2-3mm, micro-light spot 200μm 8, the angle of incidence adjustment: manual angle change 9. Angle of incidence: 55-75° (5° step), 90° 10, focus mode: manual focus 11, Mapping itinerary: not supported 12, support sample size: * up to 180mm Optional accessories Temperature console Mapping extension module Vacuum pump Transmission adsorption assembly
Introduction: SE-VM is a high precision and fast measurement spectroscopy ellipsometer. It can quickly realize the characterization and analysis of optical parameters films and nanostructures by measuring the parameters such as ellipsometry parameters and transmission/reflectivity, which is suitable for rapid measurement and characterization of thin film materials. Support multi-angle, micro-spot, visual leveling system and other high compatibility and flexible configuration, multi-function module customized design. High-precision ellipsometry solution; ultra-high precision, fast non-destructive measurement; support multi-angle, micro-spot, visual leveling system function module flexible customization; rich database and geometric model library to ensure powerful data analysis capabilities. It is widely used in measurement applications such as coating process control and tooling calibration to realize rapid characterization and analysis of optical constants and geometric features of optical films and nanostructures.
