Profile: ME-L is a scientific grade high precision automatic Muller matrix ellipsometry, condensed the Yi light research team invested in ellipsometry technology for many years, the industry with the latest cutting-edge technology innovation, including achromatic compensator, double synchronous rotating compensator control, Muller matrix data analysis can be applied to various anisotropic. Isotropic / anisotropic film material thickness, analysis and characterization of two dimensional nano grating material structure of optical nano grating constant and one-dimensional. Characteristic： 1 double rotating compensator (DRC) is configured to measure all 16 elements of the Muller matrix at one time Auto horn 2 configuration, five prototype control platform of high quality hardware module 3 interactive software interface with the help of wizard design, easy to use, easy to operate 4 rich database and geometric model library, to ensure strong data analysis capabilities Technical index: Basic function: Get a one-time full Muller matrix, the ellipsometric parameters, reflectance / transmittance, depolarization Spectral range: 193-1700nm Spectral resolution: 0.5nm Measurement time: 1-8s Angle of incidence: 45-90 degree Low light spot size: 200 m Repeatability measurement accuracy: 0.002nm Absolute accuracy: Ellipsometric parameters: w = 45 + 0.05 = 0 degrees, delta plus or minus 0.1 degrees Muller matrix: diagonal element m=1 + 0.005, non diagonal element m=0 + + 0.005 Maximum size of sample support: 8 inch
An ellipsometer is an optical measuring instrument used to detect film thickness, optical constants, and material microstructures. Due to its high measurement accuracy, it is suitable for ultra-thin films, non-contact with samples, no damage to samples and no need for vacuum, making ellipsometry an attractive measuring instrument.
The Mueller matrix ellipsometer is an integrated data processing method that uses the correlation of measurement parameters. 16 parameters can be obtained in one measurement.
