SE-i Spectral Ellipsometer Introduction: The Spectral Ellipsometer SE-Vi is an integrated in-situ spectroscopy ellipsometer for the custom development of in-situ film on-line monitoring developed for organic/inorganic coating process research, enabling rapid in-situ characterization of optical films. Spectroscopic ellipsometry is widely used in physical and chemical vapor deposition of metal thin films, organic thin films, inorganic thin films, ALD deposition and other optical thin film processes, and in-situ online monitoring and real-time feedback measurement of physical property data. Technical Parameters 1, the degree of automation: fixed angle 2, application positioning: in-situ customized 3, basic functions: Psi/Delta, N/C/S and other spectra 4, analytical spectrum: 380-1000nm, support on-demand customization 5, single measurement time: 0.5-5s 6, repeatability measurement accuracy: 0.01nm 7, the angle of incidence range: 65 ° (support customization)
Introduction: The Spectral Ellipsometer SE-Vi is an integrated in-situ spectroscopy ellipsometer for the custom development of in-situ film on-line monitoring developed for organic/inorganic coating process research, enabling rapid in-situ characterization of optical films. Spectroscopic ellipsometry is widely used in physical and chemical vapor deposition of metal thin films, organic thin films, inorganic thin films, ALD deposition and other optical thin film processes, and in-situ online monitoring and real-time feedback measurement of physical property data.
