Mapping automatic ellipsometry machine Introduction: As a small ellipsometric integration machine, the automatic ellipsometry machine realizes the online/offline overall ellipsometry solution of different ellipsometric measurement modules through the overall height modularization, electric and pneumatic integration technology. Fully automatic ellipsometry machine is widely used in scientific research for isotropic, film thickness, optical constants and structural characterization of one-dimensional and two-dimensional nano-gratings. The film involved in the new optoelectronic device industry in the industrial field (Alignment film, photoresist, ITO, luminescent film, package film) Full-line off-line fast scan measurement. Features: 1. Support laboratory research on overall ellipsometric integrated control measurement technology 2, support production line large substrate offline custom multi-point scanning measurement and output report 3, support multiple ellipsometric solutions, multi-combination integration 4, support probe module and sample machine customization Technical Parameters: Degree of automation: variable / fixed angle Application positioning: high-precision high-precision type Single measurement time: 0.5-5s Analytical spectrum: 380-1000nm (support extended to 193-2500nm) Mapping itinerary: Support 100x100mm travel extension Support sample size: Support 200mm sample
Introduction: As a small ellipsometric integration machine, the automatic ellipsometry machine realizes the online/offline overall ellipsometry solution of different ellipsometric measurement modules through the overall height modularization, electric and pneumatic integration technology. Fully automatic ellipsometry machine is widely used in scientific research for isotropic, film thickness, optical constants and structural characterization of one-dimensional and two-dimensional nano-gratings. The film involved in the new optoelectronic device industry in the industrial field (Alignment film, photoresist, ITO, luminescent film, package film) Full-line off-line fast scan measurement.
