Introduction: The RF power supply is a plasma supporting power supply. It is composed of an RF power source, an impedance matching device and an impedance power meter. It is an emerging high-tech field in China in the late 1980s. It is used in RF sputtering, PECVD chemical vapor deposition, and reactive ions. In the etching and other equipment, the modern RF power supply has developed rapidly. From the tube power supply in the 1980s, it has gradually developed into the current transistor RF power supply. The power is from watts, watts, kilowatts, to megawatts, and the frequency is 2Mhz/ 13.56Mhz/27.12Mhz/40.68Mhz, etc., and applications have also expanded from the previous vacuum field to other fields, semiconductors, beauty, etc. Frequency: 2MHZ, 3MHZ, 7MHZ, 13.56 MHz, 27.12 MHz, 40.68 MHz, 80 MHz, 81.36 MHz, 100 MHz, 150 MHz, 200 MHz (or other frequencies) Technical Parameters: Power range: 0~1000W continuously adjustable Maximum reflection: 300W Output impedance: 50 ohms Frequency stability: ±0.005% Power stability: 1000W ± 0.5% Overall efficiency: ≥75% (50Ω load, 50Ω load) Frequency signal: standard sine wave Output harmonics: second harmonic is less than -55dB Signal output mode: continuous; pulse Ambient temperature: -40 to 40 ° C Relative humidity: < 90% Cooling method: forced air cooling Input voltage: 220 V/50Hz Output connection: N type coaxial connector Panel display: digital display Protection function: standing wave protection, over temperature protection, DC power supply overcurrent protection Size: 483mm (width) * 147mm (height) * 408mm (deep)
Introduction: The RF power supply is a plasma supporting power supply. It is composed of an RF power source, an impedance matching device and an impedance power meter. It is an emerging high-tech field in China in the late 1980s. It is used in RF sputtering, PECVD chemical vapor deposition, and reactive ions. In the etching and other equipment, the modern RF power supply has developed rapidly. From the tube power supply in the 1980s, it has gradually developed into the current transistor RF power supply. The power is from watts, watts, kilowatts, to megawatts, and the frequency is 2Mhz/ 13.56Mhz/27.12Mhz/40.68Mhz, etc., and applications have also expanded from the previous vacuum field to other fields, semiconductors, beauty, etc.
