Technical parameters Output power:Rated power 1 ~ 100%, continuously adjustable, forward and reverse power LCD demonstration Power stability:±0.5%(Rated power output) Output power:Rated power of 2 to 100%,Continuously adjustable,Forward and reverse power LED display Power stability:±0.5%(Rated power output) Frequency stability: ±0.005% Power response time:Rated output starts 10ms Frequency signal:Standard sine wave , imported quartz crystal incentive Signal frequency:3.56MHz/27.12MHz/40.68MHz/81.36MHz/100MHz(Or other industrial frequency) Signal output mode :Continuous wave ; rectangular square wave Output impedance:50 ohm Withstand VSWR:VSWR ≤ 2.0 Harmonic generation:Second harmonic is lower than -50dB,Three times and higher harmonics lower than -55dB Supply voltage:DC24VPower supply Efficiency of the unit:70%(50W output) Cooling method:Forced air Ambient temperature:0 ~ 40°C Relative Humidity :85% Control Interface :Analog interface,Or RS485, RS232 communication protocol Output interface :Standard coaxial connector output, negative Control mode Control switch machine control panel manual control methods and remote computers , panel LED display the value , both for university laboratories , research institutes, R & D use , also suitable for automated production line closed-loop control .
The radio frequency power supply is a plasma supporting power supply. It is composed of a radio frequency power source, an impedance matcher and an impedance power meter. It is used in radio frequency sputtering, PECVD chemical vapor deposition, reactive ion etching and other equipment.
