Introduction:
RF power supply is a plasma power supply. It is composed of RF power source, impedance matching device and impedance power meter. It is used in RF sputtering, PECVD chemical vapor deposition, reactive ion etching and other equipment in the late 1980s in China Technical parameters output power:rated power 1 ~ 100% ,continuously adjustable, Forward and reverse power LED display Power stability:≤ ±0.5%(The rated power output) frequency stability:≤ ±0.005% Power response time:Rated output start <10ms frequency signal:Standard sine wave, the import semiconductor vibration excitation signal frequency:13.56MHz/27.12MHz/40.68MHz/81.36MHz/100MHz (other industrial frequency) Signal output form:Continuous wave; Rectangular square wave output impedance:50Ω Voltage Standing Wave Ratio:VSWR ≤ 2.0 Harmonic wave output:Second harmonic below -50dB,Three times and higher harmonic below -55dB supply voltage :AC220V power supply or AC220V±15% power supply ,50/60Hz Efficiency:≥ 70%(200W output ) Cooling mode:forced wind cooling Environment temperature 0 ~ 40℃ Relative humility :< 85% control interface:analog interface,or adopt RS485,RS232 communication protocol Output interface:The standard coaxial connector output,Negative Long lifetime:The core parts is imported transistor,Work 24 hours a day can be used for 30 years Operate mode: roducts using manual control panel and remote computer control for external control switch machine,LED display the value,suitable for university laboratories, research and development of scientific research institutes, also suitable for automatic production line closed loop control. Rf power protection: 1.Overheating protection 2. Standing wave protection 3.Over voltage protection 4.over-current protection
RF power supply is a plasma power supply. It is composed of RF power source, impedance matching device and impedance power meter. It is used in RF sputtering, PECVD chemical vapor deposition, reactive ion etching and other equipment in the late 1980s in China
