Brief introduction VTC-300USS is a cost effectiveultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on a large substrate up to 12". The system consists of (1) a 12" spin coater with the vacuum chuck, (2) compressed air assisted ultrasonic spray nozzle mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp for substrate heating (optional). Features Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrate Applications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned / uneven substrate The system also works on spin alone and spray alone modes. Multilayer process of different deposition methods is possible with the system Technical parameter Vacuum chunk with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square One oil-less pump for the vacuum chunk is included and controlled by the spin coater Spin speed: 500 - 6000 rpm adjustable (3000 rpm max for 12" and 5000 rpm max for 8" wafer) Digital control panel with two programmable segments of different spin times and speeds One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is included Two spray nozzles with the KF-25 adapter are included. (Click first picture from right to see details) One cylindrical type -- narrower spray ~20 mm diameter One cone type -- wider spray ~40 mm diameter Recommended compressed air pressure for aqueous solution: ~2 psi One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range
Brief introduction VTC-300USS is a cost effectiveultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on a large substrate up to 12". The system consists of (1) a 12" spin coater with the vacuum chuck, (2) compressed air assisted ultrasonic spray nozzle mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp for substrate heating (optional).
