Brief introduction GSL-1800X-ZF4 evaporation coating instrument is a high vacuum evaporation coating apparatus, especially suitable for the deposition of oxygen more sensitive metal film (such as Ti, Al, Au, etc.), can also be steamed with various oxide materials. The machine is provided with 4 steaming and heating boats, each of which is provided with a baffle plate. If the change of the partial configuration can also be realized on the organic material evaporation coating, can meet the requirements of light emitting devices and organic solar cells, is a coating effect of the ideal and high price of the experimental equipment. Features 1, the vacuum control unit is all set in a control box. 2, the use of independent evaporation current controller, easy to operate. 3, the vacuum chamber is equipped with 1 KF40 side pumping valve (directly connected with the mechanical pump directly connected to the rapid access to the sample, improve efficiency), 1 CF150 gate And valve (directly) with molecular Beng Xianglian, a KF16 flange (installation resistance gage), five cf35 flange (1 installation ionization gauge, four standby for and install other equipment). 4, at the bottom of the cavity is equipped with 5 water cooled electrodes, which can support 4 evaporation heating boats. 4, 5 evaporation plating heating boat with a separate removable baffle, effectively avoid the evaporation of mutual pollution. 6, the sample table is installed at the top of the cavity. 7.the cavity can be loaded with high resolution thickness,resolution: 10A 8. can use the circulating water cooling machine. Technical parameter 1, input: single-phase AC220V, 50Hz/60Hz, maximum power is less than 3.2KW 2, evaporation output: voltage AC0-8V continuously adjustable, maximum evaporation current 200A 3, vacuum chamber: 300mm diameter (diameter) * 400mm, stainless steel, wall by electro polishing 4, the door of the chamber: 200mm 5, the observation window: 95mm diameter, using special seal 6, vacuum pump: high pumping speed turbo molecular pump, pumping speed 600L/s 7, vacuum degree: 5 x 10-6torr (after the pump opens 40min) 8, the limit vacuum degree: 5 * 10-7torr (heating temperature is 100 degrees C -150 C) 9, leakage rate: 5 x 10-7Pa/s 10. Sample platform:Φ140mm 11. The distance between the evaporation boat and the sample platform: 260mm 12, the amount of cooling water required: 15L/min
Brief introduction GSL-1800X-ZF4 evaporation coating instrument is a high vacuum evaporation coating apparatus, especially suitable for the deposition of oxygen more sensitive metal film (such as Ti, Al, Au, etc.), can also be steamed with various oxide materials. The machine is provided with 4 steaming and heating boats, each of which is provided with a baffle plate. If the change of the partial configuration can also be realized on the organic material evaporation coating, can meet the requirements of light emitting devices and organic solar cells, is a coating effect of the ideal and high price of the experimental equipment.
