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Input Power | standard configuration: 220V AC, 50/ 60Hz, 700Watts (including vacuum pump) For using 110V AC, we will include a transformer for you. Please select the voltage in the optional bar. |
Output Power | 1600VDC 40mA max. |
Specimen Chamber Size | High Purity quartz tube with flat O-ring as chamber 150 mm I.D. Dia x 150mm Height |
Heating sample stage with heater | One 50mm Dia. sample stage, which can be rotated in three positions by pushing a button. The substrate heater is built in the stage with a maximum heating temperature of 500°C PID temperature controller with +/-1°C accuracy is built in touch screen control panel One needle valve installed to allow Ar gas inlet to achieve better plasma coating |
Control Panel | 6" color touch-screen control panel with PLC integration for easy operation One panel controls all parameters, including vacuum, current, target position, and substrate heating temperature One needle valve installed on the front panel to control Ar gas inlet flow |
Shield | One shield is included for extra protection |
Target |
Three Targets are included in standard package for immediate use: Au, 47 mm Dia.x0.12mm Thick Ag 47 mm Dia.x0.5mm Thick Cu 47 mm Dia.x2.5mm Thick Optional targets are available upon request. Note: Al, Mg, Zn light metal, which is sensitive to air, can not be coated using the coater. |
Vacuum Pump (Optional) |
Quality two stage vacuum pump with KF25 connector is required, but not included. Built in KF25 vacuum port for connect the coater to a vacuum pump (Pic 3) The vacuum pump must plug in the socket located in the back of coater to achieve automatic control. If you don't have a suitable pump, pls click picture below to choose one: |
Dimensions |
440mm × 330mm × 455mm (L×W×H) |
Net Weight | 50 kg |