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VTC-16-3HD-LD 3 Rotary Target Plasma Sputtering Coater

Product ID:SYZXlzjs003

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Supply Ability:50SETS/MON
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  • Product Introduction
  • Consulting
  • Model NumberVTC-16-3HD-LD
    Brand NameYIMA
    Payment TermsT/T, paypal
    Brief introduction
    VTC-16-3HD-LD is a CE certified compact Three Rotary Target Plasma Sputtering Coater with a touch screen digital controller, and a substrate heater capable of heating up to 400°C. It can coat 1- 3 types of metallic materials to samples with diameters up to 50 mm. Three sputtering targets, Gold, Silver, Copper  are included for immediate use. 
    Technical parameters
    Input Power     standard configuration: 220V AC, 50/ 60Hz, 700Watts (including vacuum pump)
        For using 110V AC, we will include a transformer for you. Please select the voltage in the optional bar. 
    Output Power     1600VDC
        40mA max.
    Specimen Chamber Size     High Purity quartz tube with flat O-ring as chamber
        150 mm I.D. Dia x 150mm Height
    Heating sample stage with heater     One 50mm Dia. sample stage, which can be rotated in three positions by pushing a button.
        The substrate heater is built in the stage with a maximum heating temperature of 500°C
        PID temperature controller with +/-1°C accuracy is built in touch screen control panel 
         One needle valve installed to allow Ar gas inlet to achieve better plasma coating
    Control Panel     6" color  touch-screen control panel with PLC integration for easy operation
       One panel controls all parameters, including vacuum, current, target position, and substrate heating temperature
        One needle valve installed on the front panel to control Ar gas inlet flow
    Shield     One shield is included for extra protection

    Target
       Three Targets are included in standard package for immediate use:
      Au,  47 mm Dia.x0.12mm Thick
      Ag   47 mm Dia.x0.5mm Thick
      Cu   47 mm Dia.x2.5mm Thick
         Optional targets are available upon request.
         Note:    Al, Mg, Zn light metal, which is sensitive to air,  can not be coated using the coater.

    Vacuum Pump
    (Optional)

     
        Quality two stage vacuum pump with KF25 connector is required, but not included. 
        Built in KF25 vacuum port for connect the coater to a vacuum pump (Pic 3)
        The vacuum pump must plug in the socket located in the back of coater to achieve automatic control.
        If you don't have a suitable pump, pls click picture below to choose one:
      Dimensions
        
      440mm × 330mm × 455mm (L×W×H)
    Net Weight 50 kg
     
  • Brief introduction
    VTC-16-3HD-LD is a CE certified compact Three Rotary Target Plasma Sputtering Coater with a touch screen digital controller, and a substrate heater capable of heating up to 400°C. It can coat 1- 3 types of metallic materials to samples with diameters up to 50 mm. Three sputtering targets, Gold, Silver, Copper  are included for immediate use. 
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