Introduction: VENA series automatic matchers are used in vacuum coating, plasma etching, plasma cleaning, physical meteorological deposition, chemical meteorological deposition, magnetron sputtering, and PECVD of solar manufacturing equipment. The main function is to realize automatic matching, which solves the problem of domestic There is a technical vacancy in vacuum coating equipment; it is automatic, fast, reliable, efficient, accurate, and saves manpower and time. The optional RF system detection module can detect the system's positive and negative power, standing wave ratio, RF signal peak voltage, current, DC bias voltage, etc. in real time, so that you can find and significantly reduce process variability. Features: 1. Safe and reliable performance, stable work for a long time 2. Real-time reflected power measurement and control 3. Optimized design, installation, use and maintenance are very simple 4. High transmission efficiency and low operating noise 5. Good shielding effect 6. It can be connected to an external matching control box and used in conjunction with other RF power generators 7. Strengthen the control of coating and etching process 8. Optimized matching algorithm accelerates matching time 9. Minimize the standing wave ratio and reflected power 10. Strict reliability test Technical Parameters: Matching power range: 0-2000W Working frequency: 13.56MHZ Normal working reflected power: <3W Matching time: <3S Transmission efficiency: ＞90% Matcher power supply: AC220V/50-60HZ Input connector: N type Output connector: UHF Control mode: manual/automatic Preset points can be set: 7 Matching impedance range: real part 0-80Ω imaginary part-j200-j200 (impedance can be adjusted according to the load) Matcher size: 450X294X151MM Whole machine weight: 9.5KG Cooling method: forced air cooling plus water cooling
Introduction: VENA series automatic matchers are used in vacuum coating, plasma etching, plasma cleaning, physical meteorological deposition, chemical meteorological deposition, magnetron sputtering, and PECVD of solar manufacturing equipment. The main function is to realize automatic matching, which solves the problem of domestic There is a technical vacancy in vacuum coating equipment; it is automatic, fast, reliable, efficient, accurate, and saves manpower and time. The optional RF system detection module can detect the system's positive and negative power, standing wave ratio, RF signal peak voltage, current, DC bias voltage, etc. in real time, so that you can find and significantly reduce process variability.
