SS-60 series scanning electron microscope Introduction
The SS-60 Series is a low profile SEM for most factory and lower level laboratory requirements. Small size and small footprint; magnification of 30 ~ 60,000 X, 15nm resolution; dual-electron and back-distributed electronic detectors; SS-60 scanning electron microscope with powerful software functions, easy to operate, easy to maintain; Features
(1) Desktop scanning electron microscope, small size and small footprint;
(2) Powerful software function, single window operation interface, which makes the user's operation convenient and simple;
(3) Software realizes real-time storage of detection graphics;
(4) The structure of the scanning electron microscope product is simple and easy to maintain and maintain;
(5) The automatic platform adopts the central positioning mode to quickly locate the sample to be tested; Technical Parameters
Resolution : 15nm (30kV, SE Image)
20nm (30kV, BSE Image)
Magnification: 30~60,000 X
Acceleration voltage: 1kV to 30kV (1kV/5kV/10 kV /15kV/20kV/30 kV -6 step)
Image Detection: Secondary Electronic Image-(SE)-Secondary Electron Image
Backscattered electron image (BSE)-Backscattered Electron Image
* Multi Detector (SE+BSE)
Observation mode: Standard Mode
Charge-up reduction mode
Electron gun system
Filament type: Pre-centered tungsten filament
Bias system: automatic bias mode
Electron gun correction: manual mode
Lens composition
Condenser: 2-piece magnetic coil lens
Objective lens: 1-section magnetic coil lens
Detector type: SE Detector/ BSE Detector
Stage system: automatic or manual
Stage movement: 3 axes (X, Y, R) or 5 axes (X, Y, R, Z, T)
Image Offset: Image shift X, Y Image Shift (±150μm)
Sample size: 70mm in height at 30mm
Image Scan: Quick Scan: 320x240 (Scan time: 0.1 sec.)
Low speed scan : 640x480 (Scan time: 3 sec.)
Picture mode 1: 1280x960 (Scan time: 30sec.)
Picture mode 2: 2560x1920 (Scan time: 60sec.)
Picture mode 3: 5120x3840 (Scan time: 120sec.)
Automatic function: Auto start, auto focus, automatic brightness contrast adjustment
Image storage format: BMP, JPEG, PNG, TIFF
Data display: Magnification, detector type, voltage, vacuum mode, Logo (Text), Date and time, Text marker, scale, etc.
Vacuum system: Fully automatic / high vacuum mode + low vacuum mode
(rotary mechanical pump) Rotary Pump/100Liters/min
(turbo molecular pump) Turbo Molecular Pump / 70Liters / sec
Vacuuming time: within 2 minutes
Control system: mouse and keyboard
PC: Desktop (Desk Top)
Software: Image file open, edit, store function length, area, angle and other measurement functions, set number initialization, image capture mode conversion, Archives, Setting (EDS) mode, etc.
Volume: Equipment host -410 (W) × 660 (D) × 600 (H) mm
External vacuum pump -400 (W) × 160 (D) × 340 (H) mm
Weight: 105kg
Equipment environment: Temperature: 15 ° C ~ 30 ° C
Humidity: 70% or less
Power supply: Single phase 100~240V AC, 1kW, 50/60Hz
Introduction
The SS-60 Series is a low profile SEM for most factory and lower level laboratory requirements. Small size and small footprint; magnification of 30 ~ 60,000 X, 15nm resolution; dual-electron and back-distributed electronic detectors; SS-60 scanning electron microscope with powerful software functions, easy to operate, easy to maintain;
