Introduction: The automatic matcher uses a unique “gradient descent high-speed tuning algorithm” that slows down the adjustment speed as it approaches the tuning point. The matching network is equipped with a microprocessor-controlled stepper motor circuit, even at the “Q” value. Very high, it is easy to find matching points, quickly adjust the input impedance to 50 ohms, fast, accurate and reliable matching under a variety of load impedances (from 30W to 5kW), RF system detection module can detect in real time The forward and reverse power, standing wave ratio, RF signal peak voltage, current, DC bias voltage, etc. of the system. When there is a predetermined preset point, the matching time is less than 3 seconds. Used in conjunction with RF power supplies, automatic and manual modes are widely used in plasma etching, plasma cleaning, physical weather deposition, chemical weather deposition, magnetron sputtering, PECVD, and semiconductor, LED, and solar manufacturing. Features: 1. Stable process control; 2. Wide range of matching, suitable for complex and variable loads; 3. The reflected power is small; 4. The reaction time is short; 5. Help to improve tool throughput and output; 6. External matching control box can be used together with other RF power generators; 7. Advanced tuning algorithm; 8. Real-time process power and impedance measurement and analysis; 9. Modular design; 10. Strict reliability measures; 11. Digital Matching Platform Technical parameter: Operating frequency: 13.56MHz\2MHz\27.12MHz\40.68MHz Rated power (50Ω impedance): 500W Normal working reflected power: <5W Matching time: <3S (set the appropriate preset point) Load impedance: 50Ω Matcher input connector: 50Ω, standard N female (customizable) Matcher output connector: 50Ω, UHF female (customizable) Control mode: automatic control and manual control can be switched Set preset points: 6 preset points can be set Match real part range: 0~80Ω Match the imaginary range: -j200~+j100 Communication interface: DB15 interface Display content: LED light indication, power light indication, forward power light indication, Motor limit light indication, running light indication, isotactic sub-light indication
RYM-1305 RF Power Automatic Matcher
Introduction: The automatic matcher uses a unique “gradient descent high-speed tuning algorithm” that slows down the adjustment speed as it approaches the tuning point. The matching network is equipped with a microprocessor-controlled stepper motor circuit, even at the “Q” value. Very high, it is easy to find matching points, quickly adjust the input impedance to 50 ohms, fast, accurate and reliable matching under a variety of load impedances (from 30W to 5kW), RF system detection module can detect in real time The forward and reverse power, standing wave ratio, RF signal peak voltage, current, DC bias voltage, etc. of the system. When there is a predetermined preset point, the matching time is less than 3 seconds. Used in conjunction with RF power supplies, automatic and manual modes are widely used in plasma etching, plasma cleaning, physical weather deposition, chemical weather deposition, magnetron sputtering, PECVD, and semiconductor, LED, and solar manufacturing.
