Introduction:
As the power supply for RF driven plasma system, it can be used in semiconductor industry, including etching, RIE, parallel plate, ICP, RF sputtering, CVD and PVC systems, plasma cleaning, PECVD, Flat noodles RF laser source, medical beauty, and also as the power supply for sensing heating and dielectric heating equipment in industrial systems. Features Output power Rated power 1 ~ 100%, continuously adjustable, forward and reverse power LCD demonstration Power stability ±0.5%(Rated power output) Output power Rated power of 2 to 100%,Continuously adjustable,Forward and reverse power LED display Power stability ±0.5%(Rated power output) Frequency stability ±0.005% Power response time Rated output starts 10ms Frequency signal Standard sine wave , imported quartz crystal incentive Signal frequency 13.56MHz/27.12MHz/40.68MHz/81.36MHz/100MHz(Or other industrial frequency) Signal output mode Continuous wave ; rectangular square wave Output impedance 50 ohm Withstand VSWR VSWR ≤ 2.0 Harmonic generation Second harmonic is lower than -50dB,Three times and higher harmonics lower than -55dB Supply voltage DC24VPower supply Efficiency of the unit 70%(50W output) Cooling method Forced air Ambient temperature 0 ~ 40°C Relative Humidity 85% Control Interface Analog interface,Or RS485, RS232 communication protocol Output interface Standard coaxial connector output, negative Control mode Control switch machine control panel manual control methods and remote computers , panel LED display t he value , both for university laboratories , research institutes, R & D use , also suitable for automated production line closed-loop control .
Introduction:
As the power supply for RF driven plasma system, it can be used in semiconductor industry, including etching, RIE, parallel plate, ICP, RF sputtering, CVD and PVC systems, plasma cleaning, PECVD, Flat noodles RF laser source, medical beauty, and also as the power supply for sensing heating and dielectric heating equipment in industrial systems.
