Sales RSG100 RF power supply, Manufacturer

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RSG100 RF power supply

Product ID：OtherRFdy019

Price: Please inquire PDF Format

Supply Ability:50 SETS/MON

Port:SHENZHEN

Product Introduction
Consulting

Model NumberRSG100

Brand NameRUISIJIEER

Payment TermsT/T, paypal

Introduction:
As a power source for RF-driven plasma systems, it can be used in the semiconductor industry, including: etching, RIE, parallel plate, ICP, RF sputtering, CVD and PVC systems, plasma cleaning, PECVD, lath RF laser source, medical beauty It can also be used as a power supply for induction heating and dielectric heating equipment in industrial systems.
Features:
1. Solid state design makes the power supply have the advantages of long life and low maintenance cost
2. "AB" class amplifier design ensures the stability of the power supply
3. Control circuit that can guarantee product consistency under high standing wave ratio operating conditions
4. Wide-band, low-Q cable design suppresses self-oscillation and fluctuation
Technical Parameters:
Frequency stability: ≤± 0.005%
Power stability: ≤±0.5%
Withstand standing wave ratio: VSWR ≤2
Harmonic output: second harmonic is lower than -40dBc, third and higher harmonics are lower than -50dBc
Noise output: less than -40dBc
Ambient temperature: 0~45 ℃ (without condensation)
Relative humidity: <85%
RF power protection:
Overheat protection, standing wave protection, overvoltage protection, overcurrent protection
Product power/model/frequency correspondence table:

Output Power	product model	Optional frequency	Control mode	Standard output connection	cooling method
50	RSG50	1.2M~150MHz Any fixed frequency	Analog 0~5VDC	N	Air-cooled
100	RSG100	1.2M-150MHz Any fixed frequency	Analog 0~10VDC	N	Air-cooled
200	RSG200	1.2M-150MHz Any fixed frequency	Analog 0~10VDC	N	Air-cooled
300	RSG300	1.2M-150MHz Any fixed frequency	Analog 0~10VDC	N	Air-cooled
500	RSG500	1.2M-150MHz Any fixed frequency	Analog /RS232/RS485	N	Air-cooled
1000	RSG1000	1.2M-100MHz Any fixed frequency	Analog /RS232/RS485	N	Air-cooled
2000	RSG2000	2M,6.78M,13.56M, 27.12M,40.6M8, 60M.81.36M	Analog /RS232/RS485	N	Water cooling
3500	RSG3500	2M,13.56M, 60M.81.36M	Analog /RS232/RS485	L29	Water cooling
6000	RSG6000	2M,13.56M, 60M,81.36M	Analog /RS232/RS485	L29	Water cooling
10kw	RSG10000	13.56M	Analog /RS232/RS485	L29	Water cooling
15kw	RSG15000	13.56M	Analog /RS232/RS485	1-5/8 Flange	Water cooling
20kw	RSG20000	13.56M	Analog /RS232/RS485	1-5/8 Flange	Water cooling

Introduction:
As a power source for RF-driven plasma systems, it can be used in the semiconductor industry, including: etching, RIE, parallel plate, ICP, RF sputtering, CVD and PVC systems, plasma cleaning, PECVD, lath RF laser source, medical beauty It can also be used as a power supply for induction heating and dielectric heating equipment in industrial systems.