Introduction: The perovskite coating machine is mainly composed of an organic/metallic source evaporation deposition chamber, a vacuum exhaust system, a vacuum measurement system, an evaporation source, a sample heating control, an electronic control system, and a gas distribution system. It is suitable for the preparation of metallic elemental films, semiconducting films, oxide films, organic films, etc. It can be used in scientific research units for the study of new materials and new process films. It can also be used for test work before mass production. It is widely used in organic and inorganic applications. Perovskite thin film solar cells, OLED and other research fields. Features: 1. The sample is located above the vacuum chamber, the evaporation source is located below the vacuum chamber, the coating is evaporated upwards, and the evaporation source is provided with a baffle device. 2. With baking heating function, the sample can be heated during the coating process, and the maximum baking and heating temperature is 180°C. 3, with water, power failure chain protection alarm device and anti-misoperation protection alarm device. Technical Parameters: Product model: Perovskite coating machine Coating room: stainless steel, square front and rear door opening structure, antifouling plate inside, chamber size about 600mm×450mm×450mm Vacuum exhaust system: molecular pump + mechanical pump system Vacuum degree: the ultimate vacuum of the coating chamber ≤ 6×10-4Pa System leakage rate: ≤1×10-7Pa Evaporation source: installed on the bottom of the vacuum chamber; 4 organic evaporation sources, 5ml volume, 2 evaporation power sources, measurable temperature, temperature control, heating temperature 400°C, power 0.5KW; 4 sets of inorganic evaporation source, volume 5ml , 2 sets of evaporation power supply, heating current 300A, power 3.2KW; The evaporation source baffle adopts automatic magnetic control mode to control its opening 6. Sample rack: Mounted on the upper cover of the vacuum chamber, can be placed Ø120mm samples, slides, rotation speed 0-30rpm 7, heating temperature: RT-180 °C, temperature measurement, temperature control 8, film thickness control instrument: quartz crystal film thickness control instrument, film thickness measurement range 0-999999 Å
Introduction: The perovskite coating machine is mainly composed of an organic/metallic source evaporation deposition chamber, a vacuum exhaust system, a vacuum measurement system, an evaporation source, a sample heating control, an electronic control system, and a gas distribution system. It is suitable for the preparation of metallic elemental films, semiconducting films, oxide films, organic films, etc. It can be used in scientific research units for the study of new materials and new process films. It can also be used for test work before mass production. It is widely used in organic and inorganic applications. Perovskite thin film solar cells, OLED and other research fields.
