Features: 1. The first domestic AFM to realize that the sample remains stationary and the probe moves to scan; 2. The first company in China to use closed-loop three-axis independent piezoelectric translating scanner to scan a wide range of high precision; 3. The size and weight of the sample are basically unlimited, especially suitable for the detection of large samples such as integrated circuit wafers; 4. Gantry scanning head design, marble base, vacuum adsorption stage; 5. Over-travel 2-D electric sample mobile station to quickly select the sample area of interest; 6. High-power optical positioning system to achieve precise positioning of the probe and sample scanning area; 7. Simple laser spot adjustment method, which can observe and adjust light spot in real time through optical CCD window; 8. The single-axis drive scanning head automatically approaches the sample vertically, accurately positions the scanning area, and the needle tip is perpendicular to the sample scanning; 9. Motor control pressure electric ceramic automatic detection intelligent needle, protect the probe and sample; 10. Equipped with a closed metal shield, pneumatic shock-absorbing platform, strong anti-interference ability, does not affect the operation of the instrument; 11. Integrated Scanner Hardware Non-linear calibration user editor, Nano characterization and measurement accuracy better than 98%. Technical Parameters Basic operating modes: contact, tap, F-Z force curve measurement, RMS-Z curve measurement, friction/lateral force, amplitude/phase, magnetic force and electrostatic force Optional Work Mode: Profile Line Fast Measurement Mode The largest sample size: Φ ≥ 300mm, H ≥ 50mm Closed-loop scanning range: XY to 100um, Z to 10um Closed-loop scanning resolution: XY to 0.2nm, Z to 0.05nm Sample movement range: 300mm×300mm Auxiliary optical positioning: 10X objective lens, optical resolution 1um (optional 20X, optical resolution 0.8um) Pneumatic shock absorbing table, damping frequency 0.5Hz Noise level: <0.1nm Scan rate 0.6Hz~4.34Hz, scan angle 0~360° Scan Control: XY uses 18-bit D/A, Z uses 16-bit D/A Data sampling: 14-bit A/D, dual 16-bit A/D multiplex simultaneous sampling Feedback method: DSP digital feedback Feedback sampling rate: 64.0KHz Communication interface: USB2.0/3.0 Operating environment: WindowsXP/7/8/10 operating system
Features: 1. The first domestic AFM to realize that the sample remains stationary and the probe moves to scan; 2. The first company in China to use closed-loop three-axis independent piezoelectric translating scanner to scan a wide range of high precision; 3. The size and weight of the sample are basically unlimited, especially suitable for the detection of large samples such as integrated circuit wafers; 4. Gantry scanning head design, marble base, vacuum adsorption stage; 5. Over-travel 2-D electric sample mobile station to quickly select the sample area of interest; 6. High-power optical positioning system to achieve precise positioning of the probe and sample scanning area; 7. Simple laser spot adjustment method, which can observe and adjust light spot in real time through optical CCD window; 8. The single-axis drive scanning head automatically approaches the sample vertically, accurately positions the scanning area, and the needle tip is perpendicular to the sample scanning; 9. Motor control pressure electric ceramic automatic detection intelligent needle, protect the probe and sample; 10. Equipped with a closed metal shield, pneumatic shock-absorbing platform, strong anti-interference ability, does not affect the operation of the instrument; 11. Integrated Scanner Hardware Non-linear calibration user editor, Nano characterization and measurement accuracy better than 98%.
