Introduction: The DSC desktop grade sputter coating system is suitable for rapid sputter coating scientific research, teaching and small batch proofing, and can quickly and inexpensively prepare a variety of micro-nano-thick film layers. The DSC 300 desktop grade sputter coating system features integration, small footprint, and flexibility. No 380V industrial power is required. No additional chillers are required. An oil-free dry-pump molecular pump set is used, eliminating the need to worry about vacuum system and operating environment pump oil contamination. . The core components use world-class brands to ensure that the equipment has excellent quality and stability and reliability. The touch screen control interface brings a simple and easy operation experience. Technical Parameters: Technical Specifications: Parameters Pump set: Germany Leybold Vacuum molecular pump; optional 90L/s or 250L/s molecular pump speed Background vacuum: <5*10-6 Torr Chamber module: Standard flanged interface cavity Ø 300 mm Substrate size: Substrate area Ø 100 mm, rotatable substrate stage; optional substrate heating module 300 degrees Target Module: 2-inch or Ø60 circular planar magnetron source; optional magnetic circuit module; optional ion source Power Module: 3 sets of 500W DC sputtering power supply, optional RF power supply; optional bias power supply Gas module: 2 MFC 50 or 20 sccm flowmeters with optional closed-loop reaction gas controller Vacuum gauge: Germany Leybold Vacuum full-scale compound gauge + MKS Pirani gauge Operation method: Touch screen operation Size: 700mm long *600mm wide *1460mm high Power supply: 220V AC, 50/60Hz grounded three-pin plug Power consumption: <3KW Cooling Module: Integrated 1 3L Water Tank Cooler
Introduction: The DSC desktop grade sputter coating system is suitable for rapid sputter coating scientific research, teaching and small batch proofing, and can quickly and inexpensively prepare a variety of micro-nano-thick film layers. The DSC 300 desktop grade sputter coating system features integration, small footprint, and flexibility. No 380V industrial power is required. No additional chillers are required. An oil-free dry-pump molecular pump set is used, eliminating the need to worry about vacuum system and operating environment pump oil contamination. . The core components use world-class brands to ensure that the equipment has excellent quality and stability and reliability. The touch screen control interface brings a simple and easy operation experience.
