Brief introduction 500 degree C vacuum hot pressing machine VHP-5T-4 is a electric vacuum flat plate type vacuum hot press, specially for wafer welding and thin film transfer and the processing samples with a maximum diameter of 100mm * 100mm, the maximum operating temperature to 500 DEG C, at this temperature can be the actual sample with the maximum pressure for change 6T (July maximum pressure 40t). Features 1, heating platform in the middle of the heating tube embedded 1000W, can achieve the effect of rapid heating; the top of the heating platform is equipped with a water cooling pipe (when the working temperature is higher than 200 C please inject cooling water (>15L/min)), to achieve rapid cooling effect. Two, using 2 precise temperature control device to control the two heating platform, and can be set up 30 sections of the temperature process, the use of PID method for temperature regulation, and with overheating and broken even protection function. 3, the use of temperature control software and PC interface to the temperature program and temperature curve into the computer. 4, digital pressure display installed in the vacuum chamber in vitro, can be set to its pressure, when the pressure reaches the set value, the motor will automatically stop. 5, hydraulic devices and heating units are placed in the vacuum chamber, and the cavity is made of 304 stainless steel, and welded with reinforced (to prevent the vacuum state cavity deformation). 6, the front end of the vacuum chamber is provided with an observation window. 7, a high sensitivity vacuum gauge installed in the vacuum chamber, measuring the degree of internal vacuum. Technical parameter 1 power: single-phase AC208V-240V 50Hz/60Hz 2, the maximum power: 2500W 3, heating platform: made of high temperature alloy steel, maximum temperature of 500 degrees Celsius, the size of 135mm * 135mm two platform mobile distance 15mm 4, hydraulic pump: electric hydraulic machine and vacuum cavity 40T is connected to the pressure control accuracy of 0.01MPa (0.1kg/cm2), automatic pressure control with digital display 5, the highest working temperature: 500 degrees 6, the heating rate: <10 C /min 7, temperature control precision: - 1 DEG C 8, vacuum degree: 10E-3torr 9, internal cavity size: 372mm * 420mm * 480mm 10, the observation window: 150mm
Brief introduction 500 degree C vacuum hot pressing machine VHP-5T-4 is a electric vacuum flat plate type vacuum hot press, specially for wafer welding and thin film transfer and the processing samples with a maximum diameter of 100mm * 100mm, the maximum operating temperature to 500 DEG C, at this temperature can be the actual sample with the maximum pressure for change 6T (July maximum pressure 40t).
