1
Model | Delta-VIS | Delta-DUV | Delta-NIR |
Wavelength range | 380-1050nm | 190-1100nm | 900-1700nm |
Thickness range | 50nm-40um | 1nm-30um | 10um-3mm |
Accuracy1 | 2nm | 1nm | 10nm |
accuracy | 0.2nm | 0.2nm | 3nm |
Angle of incidence | 0 degrees | 0 degrees | 0 degrees |
Sample material | Transparent or translucent | Transparent or translucent | Transparent or translucent |
Measurement mode | Reflection / transmission | Reflection / transmission | Reflection / transmission |
Spot size2 | 2mm | 2mm | 2mm |
Can it be online? | yes | yes | yes |
Scanning selection | XY optional | XY optional | XY optional |