Introduction: The SR-C series of compact high-precision reflective film thickness gauges use the principle of optical interference to quickly and accurately measure film thickness, optical constants and other information by analyzing the reflection spectrum formed by the reflected light on the surface of the film and the reflected light at the interface between the film and the substrate. It has: optical thin-film measurement solutions; non-contact, non-destructive measurement; core algorithms support thin-film to thick-film, single-layer to multi-layer thin-film analysis; flexible configuration, support for customization and other advantages. It is widely used in the measurement of various media protective films, organic films, inorganic films, metal films, coatings and other thin films. Features: 1. High-intensity halogen light source is used, and the spectrum covers the visible light to the near infrared range; 2. Adopt optical and electromechanical highly integrated design, small size and easy operation; 3. Based on the principle of interference of reflected light on the upper and lower interfaces of the film layer, easily analyze single film to multiple layers; 4. Configure powerful core analysis algorithm: FFT analysis of thick film, curve fitting analysis method to analyze physical parameter information of film; technical parameter: Model: SR-C Basic functions: parameters such as reflectivity Analysis spectrum: 380-800nm/650-1100nm (support customized) Film thickness measurement range: 50nm-40μm Single measurement time: ≤1s Repeatability test accuracy: 0.1nm (100nm SiO2 silicon wafer, 30 measurements) Absolute accuracy: ±1nm or 1% (with film thickness dependence) Spot size: 0.5-3mm Angle of incidence: vertical incidence
Introduction: The SR-C series of compact high-precision reflective film thickness gauges use the principle of optical interference to quickly and accurately measure film thickness, optical constants and other information by analyzing the reflection spectrum formed by the reflected light on the surface of the film and the reflected light at the interface between the film and the substrate. It has: optical thin-film measurement solutions; non-contact, non-destructive measurement; core algorithms support thin-film to thick-film, single-layer to multi-layer thin-film analysis; flexible configuration, support for customization and other advantages. It is widely used in the measurement of various media protective films, organic films, inorganic films, metal films, coatings and other thin films.
