Minimum detectable helium leak | Test range | Start –up time | Response time | Maximum inlet test pressure | |
5×10-12Pa·m3/s | 1×10-3a·m3/s-1 ×10-12Pa·m3/s |
3Min | 1S | 1000Pa | |
Maximum inlet test pressure | Terminal vacuum | Display | Host Size | Weight | |
1000Pa | 5×10-4Pa | Touch-TFT display | 560(W)×420(D) ×280(h) | 43kg |
Parts name |
model | manufacturer | Producing area |
High vacuum pump | 070 | Leybold | German |
Primary pump | GHD030 | ULVAC | Japan |
Electromagnetic valve | 0256 | Burkert | German |
amplifier | 549 | AD | USA |