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RSG300 Professional RF power supply for Ion etching

Product ID:OtherRFdy003

Price: Please inquire PDF Format
Supply Ability:20SETS/MON
Port:SHENZHEN
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  • Product Introduction
  • Consulting
  • Model NumberRSG300
    Brand NameYIMA
    Payment TermsT/T, paypal
    Technical parameters
    Output power:Rated power 1 ~ 100%, continuously adjustable, forward and reverse power LCD demonstration
    Power stability:±0.5%(Rated power output)
     Output power:Rated power of 2 to 100%,Continuously adjustable,Forward   and reverse power LED display
    Power stability:±0.5%(Rated power output)
    Frequency stability: ±0.005%
    Power response time:Rated output starts   10ms
    Frequency signal:Standard sine wave , imported quartz crystal incentive
    Signal frequency:3.56MHz/27.12MHz/40.68MHz/81.36MHz/100MHz(Or  other industrial frequency)
    Signal output mode :Continuous wave ; rectangular square wave
    Output impedance:50 ohm
    Withstand VSWR:VSWR ≤ 2.0
    Harmonic generation:Second harmonic is lower than -50dB,Three times and higher  harmonics lower than -55dB
    Supply voltage:DC24VPower supply
    Efficiency of the unit:70%(50W output)
    Cooling method:Forced air
    Ambient temperature:0 ~ 40°C
    Relative Humidity :85%
    Control Interface :Analog interface,Or RS485, RS232 communication protocol
    Output interface :Standard coaxial connector output, negative
     Control mode
    Control switch machine control panel manual control methods and remote computers , panel LED 
    display the value , both for university laboratories , research institutes, R & D use , also suitable for automated
     production line closed-loop control .

     
  • The radio frequency power supply is a plasma supporting power supply. It is composed of a radio frequency power source, an impedance matcher and an impedance power meter. It is used in radio frequency sputtering, PECVD chemical vapor deposition, reactive ion etching and other equipment.
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