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Evaluation parameters | |
Evaluation parameters | Ra、Rz、(Rmax、Ry)、Rt、Rp、Rpm、Rz(jis)、Rv、R3z、Rs m、Rsk、Rk、Rc、Rpk、Rvk、Mr1、Mr2 |
Measuring range | |
Z-axis | 800μm |
X-axis | 50mm |
Straightness accuracy | |
Straightness accuracy | 0.4μm |
Resolution (Z axis) | |
Resolution (Z axis) | 0.001μm |
Sample number / decomposition energy | |
Sample number / decomposition energy | 9600 points / 16bit |
filter | |
filter | Gao Si (Gaussian) filter (ISO11562:1996), 2RC filter |
Sampling length | |
Sampling length | λc ╳3、4、5、6、7(1.0-17.5mm) |
Cut-off wavelength | |
Cut-off wavelength | 0.25,0.8,2.5 |
Measuring speed | |
Measuring speed | 0.1mm/s,0.32mm/s,0.5mm/s |
return speed | |
return speed | (automatic) 1mm/s |
indicating error | |
indicating error | ±5% |
Stability of display | |
Stability of display | 3% |
measurement reproducibility | |
measurement reproducibility | 3% |
Graphic magnification rate | |
Graphic magnification rate | 10-500000 automatic adjustment |
sensor | |
sensor | Needle tip 2 μ m diamond (measuring force 1mN) |
R5 μ m diamond (measuring force 4mN) |