Evaluation parameters |
Evaluation parameters |
Ra、Rz、(Rmax、Ry)、Rt、Rp、Rpm、Rz(jis)、Rv、R3z、Rs m、Rsk、Rk、Rc、Rpk、Rvk、Mr1、Mr2 |
Measuring range |
Z-axis |
800μm |
X-axis |
50mm |
Straightness accuracy |
Straightness accuracy |
0.4μm |
Resolution (Z axis) |
Resolution (Z axis) |
0.001μm |
Sample number / decomposition energy |
Sample number / decomposition energy |
9600 points / 16bit |
filter |
filter |
Gao Si (Gaussian) filter (ISO11562:1996), 2RC filter |
Sampling length |
Sampling length |
λc ╳3、4、5、6、7(1.0-17.5mm) |
Cut-off wavelength |
Cut-off wavelength |
0.25,0.8,2.5 |
Measuring speed |
Measuring speed |
0.1mm/s,0.32mm/s,0.5mm/s |
return speed |
return speed |
(automatic) 1mm/s |
indicating error |
indicating error |
±5% |
Stability of display |
Stability of display |
3% |
measurement reproducibility |
measurement reproducibility |
3% |
Graphic magnification rate |
Graphic magnification rate |
10-500000 automatic adjustment |
sensor |
sensor |
Needle tip 2 μ m diamond (measuring force 1mN) |
R5 μ m diamond (measuring force 4mN) |