| Measurement items | |
| Roughness part | Ra,Rz=Ry(JIS),Rq,Rt=Rmax,Rp,Rv,R3z,R3y,RzJIS,Rs,Rsk,Rku,Rsm,Rmr |
| Profilometer part | Point, line, circle, partial circle, ellipse, arc processing (arc radius, center distance, distance from center to line, distance from intersection point to center, etc.), highest point, lowest point, distance, angle processing (coordinate angle, straight line angle), Straightness, groove depth, groove width, edge distance, groove center distance, horizontal distance, convexity (logarithmic curve), contour, etc. |
| Roughness measurement range | |
| X axis | RA：0.005μm—16.00μm |
| Z1 axis | ±20μm、±40μm、±80μm |
| Sampling length L | 0.25mm / 0.80mm / 2.50mm, automatic |
| Evaluation of length | 1L-5L (optional L is sampling length) |
| Measuring stroke length | 3L-7L (optional L is sampling length) |
| Profilometer measurement range | |
| X axis (transverse guide rail) | 100mm |
| Z1 axis (sensor) | 15mm |
| Z axis (column) | 400mm |
| Roughness measurement accuracy | |
| Indication error 1 | 0.001μm |
| Indication error 2 | ≤±7％ |
| Profilometer measurement accuracy | |
| X axis (LX axis guide rail moving distance) | ±(1.2+2L/100)μm |
| Z1 axis (H=Z1 axis height measurement) | ±(1.8+4H/100)μm |
| X-axis horizontal arm | |
| Straightness | 1.2μm/100mm |
| Grating resolution | 0.1μm |
| Grating origin | Enter port |
| Z1 axis sensor | |
| Resolution of the | 0.2μm |
| Sensor type | Grating sensor |
| origin | import |
| Direction of movement | Forward/backward direction |
| load | 0.5-6g |
| Needle tip | Cemented carbide: 0.05mm / 0.01mm |
| Climbing angles | Up 77 degrees, down 88 degrees. |
| Drive stroke | |
| Maximum drive stroke length | 17.5mm/0.71 inch |
| Minimum drive stroke length | 1.3mm/0.052 inch |
| Roughness velocity | |
| Measuring speed | 0.135mm/s、0. 5mm/s、1mm/s |
| Profilometer velocity | |
| Measuring speed | 0.1mm/s,0.2mm/s,0.5mm/s（[User-defined） |
| Positioning speed | 0.1mm/s,0.2mm/s,0.5mm/s（User-defined） |
| Graphic magnification / reduction | |
| Graphic amplification | Scalable, magnified |
| Integrated adjustment table | |
| Integrated adjustment table | X axis horizontal tilt adjustment range: ±30 ° Y-axis adjustment range: ±7.5mm Z axis rotary adjustable 360 degrees (with fine tuning device) |
| Installation requirements | |
| Electric source | 220-240V AC, 50HZ, single ground wire; maximum power consumption 450W |
| compressed air | Pure compressed air: 0.4MPp, consumed 0.1m3 / min (0.25m3 / min supplied by gas source) |
| Environmental requirements | Working temperature: 10 °-30 °(normal temperature); humidity 20-80%RH (no dew), good ground line, no obvious vibration source |
Please inquire
Please inquire
