Glow discharge spectrometer
Glow discharge spectrometer
Glow discharge spectrum of the working principle
Glow discharge chamber filled with low-pressure argon gas, when the voltage applied to discharge the two poles reaches a certain value, more than the required energy to stimulate argon to form a glow discharge, the dissociation of the discharge gas into a positive charge ions and free electrons. Under the action of an electric field, positively charged ions accelerate bombardment to the (cathode) sample surface, creating a cathode sputtering. In the discharge region, the sputtered elemental atoms collide with the electrons and are excited to emit light.
The whole process is dynamic. Argon ions continuously bombard the surface of the sample and sputter the sample particles. The sample particles continue to enter the plasma for excitation and luminescence, and new layers are continuously sputtered to obtain the curve of the element content of the coating with time.
Glow discharge plasma has a dual role, one is denudation of the sample surface particles; the second is to stimulate the erosion of the sample particles. Separating erosion and excitation in space and time is very important for glow discharge operation. Ablation occurs on the surface of the sample and excitation occurs in the plasma. Such a design can well suppress the matrix effect.
Argon gas is the most commonly used glow discharge gas, the price is relatively cheap. Argon excites all elements except fluoride. Neon should be used as the excitation gas for testing of fluorine or argon. Sometimes mixed gases are also used. For example, Ar + He is very suitable for glass analysis. Ar + H2 improves the detection of silicon and Ar + O2 can be used in some special fields.
The main function of the spectrometer is to monitor continuously the changes in the composition of the sample by collecting and spectroscopically detecting light from the plasma. The detector of the spectrometer must be able to respond quickly and observe the changes in depth of all the elements in real time and with high dynamics. Multi-color glow discharge spectrometer instrument is an important part of the realization of high-dynamic synchronization of the depth of protection. The grating is the core of the spectrometer, the quality of the grating determines the performance of the spectrometer, such as spectral resolution, sensitivity, spectrometer working range, stray light suppression. Glow discharge is a weak signal and the magnitude of the luminous flux has a crucial effect on the overall performance of the instrument.
Glow Discharge Spectrometer Technical Features
As a new type of surface analysis technology, glow discharge spectrometer has drawn more and more attention in recent years. Glow discharge spectrometer has the unique and irreplaceable advantage of in-depth analysis of the surface and depth of the material. It has the advantages of fast analysis, simple operation, no extra-high vacuum components and low maintenance cost.
Glow discharge spectrometer originated in the steel industry, mainly used for the determination of galvanized steel and steel surface passivation film, but with the gradual improvement of glow discharge spectroscopy technology, the performance of the instrument can be improved, the analysis of the material More and more widely.
The performance improvement is manifested in two aspects: on the one hand, with the continuous improvement of the depth resolution, glow discharge spectroscopy technology can gradually meet the testing needs of the film. Now, glow discharge spectrometer depth resolution up to nanometer level, the testable coating thickness from a few nanometers to 150 microns, some special materials can reach 200 microns.
On the other hand, the performance of the glow source is improved. In the past, the glow discharge spectrometer was mainly used in the steel industry. The samples tested were nearly all conductors. The DC DC glow source could meet this type of test. However, with the functional coating The continuous development of more and more non-conductive, semiconductor coatings appear, which makes the unique advantages of radiofrequency glow source constantly highlighted. RF glow source test both conductors can also test non-conductor samples, without the need to replace any components and test methods, easy to use. If you need to test the thermal material or to suppress heat diffusion elements need to use pulsed RF glow source. In pulse mode, the power is not applied to the sample continuously, which can suppress undesirable element diffusion or damage the heat-sensitive sample and ensure the accuracy of the test result.
Glow discharge spectrum of the working principle
Glow discharge chamber filled with low-pressure argon gas, when the voltage applied to discharge the two poles reaches a certain value, more than the required energy to stimulate argon to form a glow discharge, the dissociation of the discharge gas into a positive charge ions and free electrons. Under the action of an electric field, positively charged ions accelerate bombardment to the (cathode) sample surface, creating a cathode sputtering. In the discharge region, the sputtered elemental atoms collide with the electrons and are excited to emit light.
The whole process is dynamic. Argon ions continuously bombard the surface of the sample and sputter the sample particles. The sample particles continue to enter the plasma for excitation and luminescence, and new layers are continuously sputtered to obtain the curve of the element content of the coating with time.
Glow discharge plasma has a dual role, one is denudation of the sample surface particles; the second is to stimulate the erosion of the sample particles. Separating erosion and excitation in space and time is very important for glow discharge operation. Ablation occurs on the surface of the sample and excitation occurs in the plasma. Such a design can well suppress the matrix effect.
Argon gas is the most commonly used glow discharge gas, the price is relatively cheap. Argon excites all elements except fluoride. Neon should be used as the excitation gas for testing of fluorine or argon. Sometimes mixed gases are also used. For example, Ar + He is very suitable for glass analysis. Ar + H2 improves the detection of silicon and Ar + O2 can be used in some special fields.
The main function of the spectrometer is to monitor continuously the changes in the composition of the sample by collecting and spectroscopically detecting light from the plasma. The detector of the spectrometer must be able to respond quickly and observe the changes in depth of all the elements in real time and with high dynamics. Multi-color glow discharge spectrometer instrument is an important part of the realization of high-dynamic synchronization of the depth of protection. The grating is the core of the spectrometer, the quality of the grating determines the performance of the spectrometer, such as spectral resolution, sensitivity, spectrometer working range, stray light suppression. Glow discharge is a weak signal and the magnitude of the luminous flux has a crucial effect on the overall performance of the instrument.
Glow Discharge Spectrometer Technical Features
As a new type of surface analysis technology, glow discharge spectrometer has drawn more and more attention in recent years. Glow discharge spectrometer has the unique and irreplaceable advantage of in-depth analysis of the surface and depth of the material. It has the advantages of fast analysis, simple operation, no extra-high vacuum components and low maintenance cost.
Glow discharge spectrometer originated in the steel industry, mainly used for the determination of galvanized steel and steel surface passivation film, but with the gradual improvement of glow discharge spectroscopy technology, the performance of the instrument can be improved, the analysis of the material More and more widely.
The performance improvement is manifested in two aspects: on the one hand, with the continuous improvement of the depth resolution, glow discharge spectroscopy technology can gradually meet the testing needs of the film. Now, glow discharge spectrometer depth resolution up to nanometer level, the testable coating thickness from a few nanometers to 150 microns, some special materials can reach 200 microns.
On the other hand, the performance of the glow source is improved. In the past, the glow discharge spectrometer was mainly used in the steel industry. The samples tested were nearly all conductors. The DC DC glow source could meet this type of test. However, with the functional coating The continuous development of more and more non-conductive, semiconductor coatings appear, which makes the unique advantages of radiofrequency glow source constantly highlighted. RF glow source test both conductors can also test non-conductor samples, without the need to replace any components and test methods, easy to use. If you need to test the thermal material or to suppress heat diffusion elements need to use pulsed RF glow source. In pulse mode, the power is not applied to the sample continuously, which can suppress undesirable element diffusion or damage the heat-sensitive sample and ensure the accuracy of the test result.
