Measuring type | Measuring range | Resolution ratio | Precision |
Positioning accuracy | 0-30m | 100 pm (0.0001 μm) | 0.4μm/m |
Speed | 0 – 7 m/s | 0.25μm/s | 0.1 % |
Rotation Angle | ± 5° | 0.04 arcsec | ± 0.2 % |
straightness(using the composite optical prism group) | 0 – 20 m | 0.02 μm ( for a 100 mm baseline) |
± 1 % |
Flatness | 0 – 15 m vertical area ± 2 mm |
0.02 μm (for a 100 mm baseline) |
± 0.5 % |
straightness (using the linear optical prism group) |
0 – 3 m | 0.5 μm | ±1 % (0.5 ± 0.15 L2) in metres |
3D straightness measurement | 0 – 5 m | 0.1 μm | 20 μm ± 15 μm/m |
Vertical degree | ± 1000 arcsec | 0.4 arcsec | ± 1 % ± (1.5 arcsec) |
Angle measurement | 0 – 3600 arcsec | 0.04 arcsec | ± 0.2 % |