HGZ-AVI series active vibration isolation platform
Introduction: The HGZ-AVI series active vibration isolation platform consists of two parts: the vibration damping platform and the controller. The vibration damping platform adopts precision metal spring to achieve passive vibration isolation, and the precision linear motor realizes active vibration reduction. The speed sensor used for feedback control detection uses an ultra-precise vibration probe, and all the components and components are enclosed in the body. The system does not need to provide additional compressed air during operation, and can adaptively adjust the ground feedforward to achieve 6 degrees of freedom damping. Low frequency vibration VS medium and high frequency vibration Low-frequency vibration: large energy, long wavelength, large distance, and geological. High frequency vibration: limited energy, motor, pump, house structure. Electron mirrors are sensitive to low frequency vibrations. There is a cylinder (passive) inside the electron microscope, which can eliminate medium and high frequency vibration by itself. High-frequency vibration can be solved by changing the position, and low-frequency vibration is difficult to solve by passive. Features: 1. Designed for scanning/double beam electron microscopy (SEM/FIB) 2. Effective active vibration damping system starting from below 1 Hz 3. Double active control with feedforward, the low frequency effect is significantly increased 4. Load capacity: 300kg to 1500kg 5. 6 degrees of freedom active control 6. No additional compressed air required 7. Professional R&D personnel perform precise debugging according to site conditions to ensure optimal performance.
Introduction: The HGZ-AVI series active vibration isolation platform consists of two parts: the vibration damping platform and the controller. The vibration damping platform adopts precision metal spring to achieve passive vibration isolation, and the precision linear motor realizes active vibration reduction. The speed sensor used for feedback control detection uses an ultra-precise vibration probe, and all the components and components are enclosed in the body. The system does not need to provide additional compressed air during operation, and can adaptively adjust the ground feedforward to achieve 6 degrees of freedom damping. Low frequency vibration VS medium and high frequency vibration Low-frequency vibration: large energy, long wavelength, large distance, and geological. High frequency vibration: limited energy, motor, pump, house structure. Electron mirrors are sensitive to low frequency vibrations. There is a cylinder (passive) inside the electron microscope, which can eliminate medium and high frequency vibration by itself. High-frequency vibration can be solved by changing the position, and low-frequency vibration is difficult to solve by passive.
