Introduction: The 6" single temperature zone CVD vacuum tube furnace GSL-1100X-6-S is a vacuum tube furnace with 6" inner diameter of the furnace tube. It can grow a variety of thin films on a maximum 5" substrate in different atmospheres. Features: 1, double shell, with a circulating air cooling system. The furnace body is made of high-purity alumina polycrystalline fiber insulation material, which is environmentally friendly and energy-saving. The housing temperature is <70°C. 2, using stainless steel vacuum seal flange, use double silicone seal ring to seal. 3, with double K-type thermocouple and an additional temperature calibration detection system. 4, using PID controller, you can set 30 paragraphs of heating and cooling procedures. 5, has passed CE certification. Technical Parameters: Power supply: AC220V 8KW Quartz tube: diameter Ø152mm, length 1016mm Heating element: Ni-Cr-Al resistance wire Heating area: 600mm Constant temperature area: 200mm Working temperature: up to 1100°C, continuous work 400°C-1000°C Maximum cooling rate: 10°C/min Thermocouple: Double K Temperature control accuracy: ±1°C Vacuum degree: 10-2torr (mechanical pump), 10-5torr (molecular pump) Armored thermocouple detection port: 1 Vacuum interface: KF40 Size: 1000mm × 680mm × 920mm; Weight: 250kg Standard accessories Quartz tube: 1 Alumina plugging: 2 Installation conditions This equipment is required to be used at altitudes below 1000m, temperature 25°C±15°C, and humidity 55%Rh±10%Rh. 1, water: no 2, electricity: AC220V 50Hz, must have a good ground 3, gas: If used as a CVD system, you need to bring your own gas source (standard with pagoda joints, can be modified into a double card sleeve joints at their own expense) 4, table: size 1600mm × 600mm × 700mm, load-bearing 300kg or more 5, ventilation device: need
Introduction: The 6" single temperature zone CVD vacuum tube furnace GSL-1100X-6-S is a vacuum tube furnace with 6" inner diameter of the furnace tube. It can grow a variety of thin films on a maximum 5" substrate in different atmospheres.
