F-400 / 3600 turbo molecular pump Introduction
F-400 / 3600 turbo molecular pump can be used in vacuum furnace, coating, vacuum oil filling equipment, vacuum exhaust table, vacuum environment simulation equipment and other fields. Technical Parameters
Model: F-400 / 3600
Pumping rate (L / s): 3600
Exhaust flange: DN100 LF (DN400 ISO-K)
Air inlet flange: DN400 LF (DN100 ISO-K)
Compression ratio: N2: 108; H2: 5 × 102
Ultimate pressure (Pa): ≤6 × 10-6
Recommended starting pressure (Pa): <100
Rated speed (rpm): 15300
Start-up time (min): ＜ 15.5
Bearing: Precision ceramic bearing
Vibration value ((mm)): ≤0.5
Recommended foreline pump (L / s): 30
Oil charge (ml): 230
Water nozzle: inner diameter Φ10 in-line self-sealing
Cooling method: water cooling
Cooling water flow (L / min): 1
Cooling water pressure (mpa): 0.15
Cooling water temperature (℃): ≤25
Pump body baking temperature (℃): ≤90
Ambient temperature (℃): 5-40
Lubrication method: oil lubrication
Installation: vertical ± 5 °
Weight (kg): 130
Introduction
F-400 / 3600 turbo molecular pump can be used in vacuum furnace, coating, vacuum oil filling equipment, vacuum exhaust table, vacuum environment simulation equipment and other fields.
