F-250 / 1500 series turbo molecular pump Introduction
F-250 / 1500 series turbomolecular pumps are widely used in various fields of surface analysis, accelerator technology, plasma technology, electric vacuum device manufacturing and vacuum technology. Commonly used in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic component manufacturing, Low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnaces and other fields.
The F250 / 1500 series turbomolecular pump includes the following models:
F250 / 1500 ——Ordinary bearing water-cooled turbo molecular pump
F250 / 1500T ——Ceramic bearing water-cooled turbo molecular pump
F250 / 1500N ——Corrosion-resistant ceramic bearing water-cooled turbo molecular pump Feature
F250 / 1500 ordinary turbomolecular pump is supported by imported precision metal ball bearings. The cooling method is through water cooling. The rotor is precisely dynamic balanced to ensure reliable operation and low vibration. The motor is a squirrel-cage three-phase motor. This type of lubrication determines that the molecular pump can only be installed vertically.
The F250 / 1500T ceramic bearing turbo molecular pump is different from the ordinary type in that the bearing is supported by imported precision ceramic ball bearings. The sphere of the ceramic bearing is a special composite material, which has a lower mass than ordinary metal spheres, so it is rotating. The centrifugal force is small, the frictional heat is small, and the wear is small. Generally speaking, the service life of ceramic bearings is more than twice that of ordinary bearings.
The F250 / 1500N corrosion-resistant turbo molecular pump is different from the ordinary type in that the bearings are supported by corrosion-resistant ceramic ball bearings, the lubricating oil is dedicated anti-corrosion oil with high chemical stability, and the shaft system is designed with a protective gas path. Protective gas N2. The pump can be used in corrosive atmosphere working environment such as ion etching, plasma and semiconductor device production.
Introduction
F-250 / 1500 series turbomolecular pumps are widely used in various fields of surface analysis, accelerator technology, plasma technology, electric vacuum device manufacturing and vacuum technology. Commonly used in industrial leak detection, PVD, CVD, ion implantation, vacuum electronic component manufacturing, Low-E glass, ITO glass, optical coating, solar cells, electron beam welding, vacuum furnaces and other fields.
The F250 / 1500 series turbomolecular pump includes the following models:
F250 / 1500 ——Ordinary bearing water-cooled turbo molecular pump
F250 / 1500T ——Ceramic bearing water-cooled turbo molecular pump
F250 / 1500N ——Corrosion-resistant ceramic bearing water-cooled turbo molecular pump
