CXF-320/3000 Magnetic Levitation Molecular Pump Introduction
CXF-320/3000 magnetic levitation molecular pump can be used in semiconductor manufacturing, glass coating, solar cells, electron microscope, metallurgy, plasma technology, medical equipment and other fields. Technical Parameters
Model: CXF-320 / 3000
Pumping rate (L / s): 3000
Exhaust flange: KF40
Air inlet flange: ISO-F 320 (other flanges need to be customized)
DN320LF
Ultimate pressure: ≦ 5 × 10‐7Pa
Recommended starting pressure: <5Pa
Rated speed (rpm): 21000
Start-up time (min): 12
Vibration value (μm): <0.05
Recommended foreline pump (L / s): 15
Water spout: Inner diameter Φ10 inline self-sealing
Cooling method: water cooling
Cooling water temperature (° C): 20
Cooling water flow (L / min): 1
Cooling water pressure (mpa): 0.15
Ambient temperature (° C): 5 ～ 45
Installation: vertical, horizontal, upside down
Weight (kg): 70
Introduction
CXF-320/3000 magnetic levitation molecular pump can be used in semiconductor manufacturing, glass coating, solar cells, electron microscope, metallurgy, plasma technology, medical equipment and other fields.
