CXF-200 / 1400 Magnetic Levitation Molecular Pump Introduction
CXF-200 / 1400 magnetic levitation molecular pump can be used in semiconductor manufacturing, glass coating, solar cell, electron microscope, metallurgy, plasma technology, medical equipment and other fields. Features
High cleanliness
Low vibration
Maintenance-free
Pollution-free
Automatic rotor balance
Automatic protection in case of power failure
Installation at any angle Technical Parameters
Model: CXF1400
Pumping rate (L / s): 1400
Compression ratio: N2: 107
Ultimate pressure: ≦ 2 × 10-6
Recommended starting pressure (Pa): <20
Exhaust flange: KF40
Air inlet flange: DN200 LF
DN200 CF
Rated speed (rpm): 24000
Start-up time (min): 7
Vibration value (μm): <0.05
Recommended foreline pump (L / s): 15
Water spout: Inner diameter Φ10 inline self-sealing
Installation: vertical and horizontal
Cooling method: water cooling
Cooling water temperature (℃): 20
Cooling water flow (L / min): 1
Cooling water pressure (mpa): 0.15
Ambient temperature (℃): 5—45
Weight (kg): 48
Introduction
CXF-200 / 1400 magnetic levitation molecular pump can be used in semiconductor manufacturing, glass coating, solar cell, electron microscope, metallurgy, plasma technology, medical equipment and other fields.
