CX-PRN11 voltage Pirani composite vacuum transmitter Introduction: PRN11 is composed of a differential pressure MEMS piezoelectric sensor and a Pirani sensor integrated, which achieve seamless transition in measurement. It has an integrated electronic control circuit, digital communication system, analog voltage output, and two set points as process control. Continuous vacuum process equipment usually uses a vacuum lock as the interface for continuously emptying the main chamber. When the vacuum lock is at atmospheric pressure or high vacuum, an independent actuator is needed to indicate the opening direction of the indicator valve. PRN11 combines the advantages of MEMS piezoelectric and Pirani to form an integrated and compact component, which achieves high-precision, fast response, and high repetition pressure measurement of atmospheric pressure accessories, and has a wide range from atmospheric pressure to 0.001Pa. It is an ideal vacuum lock control pressure sensor. Features: 1. Piezoelectric differential pressure unit and Pirani composite wide range 2. Built in temperature compensation, high-precision 3. Dual control point setting switch 4. One click atmospheric/vacuum calibration 5. Voltage type analog output 6. Supports RS485 communication Modbus RTU protocol Technical parameters: Measurement range: one × 10-2-1.5 × 10+5Pa three × 10 * 3~1.5 × 10 * Pa: ± 1% reading (piezoresistive section) Measurement accuracy: one × 10-1~3.0 × 10 * 3Pa: ± 5% reading (Pirani section) one × 10-2-3.0 × 10-1Pa: ± 10% reading (Pirani section) Repeatability: ± 1% of full range Maximum pressure resistance (absolute pressure): 2.0 × 10 * 5Pa Response time: 100ms Working environment: Working temperature: 0 ℃~+50 ℃; Storage temperature: 5 ℃~+85 ℃ (without condensation) Signal output: RS485 Modbus RTU (non isolated), baud rate 9600bps, analog output 0.0V~+10.3VDC, minimum impedance 100 Power supply:+16VDC to+30VDC/0.5A, maximum power consumption 1.5W Vacuum system connection: default DN16ISO-KF (other customization required) Weight: 120g (standard DN16ISO-KF flange) Vacuum contact materials: SS304, SS316L stainless steel, tungsten filament, kovar alloy, glass
Introduction: PRN11 is composed of a differential pressure MEMS piezoelectric sensor and a Pirani sensor integrated, which achieve seamless transition in measurement. It has an integrated electronic control circuit, digital communication system, analog voltage output, and two set points as process control. Continuous vacuum process equipment usually uses a vacuum lock as the interface for continuously emptying the main chamber. When the vacuum lock is at atmospheric pressure or high vacuum, an independent actuator is needed to indicate the opening direction of the indicator valve. PRN11 combines the advantages of MEMS piezoelectric and Pirani to form an integrated and compact component, which achieves high-precision, fast response, and high repetition pressure measurement of atmospheric pressure accessories, and has a wide range from atmospheric pressure to 0.001Pa. It is an ideal vacuum lock control pressure sensor.
